JPH03102728U - - Google Patents
Info
- Publication number
- JPH03102728U JPH03102728U JP1091790U JP1091790U JPH03102728U JP H03102728 U JPH03102728 U JP H03102728U JP 1091790 U JP1091790 U JP 1091790U JP 1091790 U JP1091790 U JP 1091790U JP H03102728 U JPH03102728 U JP H03102728U
- Authority
- JP
- Japan
- Prior art keywords
- sheet material
- chuck head
- view
- etching
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1091790U JPH03102728U (en]) | 1990-02-06 | 1990-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1091790U JPH03102728U (en]) | 1990-02-06 | 1990-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03102728U true JPH03102728U (en]) | 1991-10-25 |
Family
ID=31514465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1091790U Pending JPH03102728U (en]) | 1990-02-06 | 1990-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03102728U (en]) |
-
1990
- 1990-02-06 JP JP1091790U patent/JPH03102728U/ja active Pending